
BRONKHORST HIGH-TECH B.V.
1 Scope of this manual
1.1 Introduction
ThismanualcoverstheFLOW‐SMSseries,BronkhorstHigh‐Tech’slightweight,modulargasdeliverysystem.It
handlesthegeneralinstructionsneededforthesurfacemountcomponents,i.e.digitalmassflow/pressure
metersandcontrollers,controlvalves,shut‐offvalvesandfilters,aswellasthemanifoldcomponentssuchas
mixinganddistributionchambers,supportrailsand adapterplates.
FLOW‐SMSsystemsareassembledaccordingtocustomer’sspecifications.Therangesfortheflowsensorcanbe
selectedbetweenapprox.5ml
n
/minupto50l
n
/minorevenhigher.Incaseapressuresensorisincluded,the
pressurerangecanbechosenbetween0‐100mbarand0‐10barabsoluteorgauge.Dependingontheapplication
thecustomermaypreferasystemwithfacesealfittings,compressiontypecouplings,orflangesaccordingto
customers’specification.Onrequest,thesystemwillbeassembled,tested,andpackaged inacleanroom.
Example:
1.2 References to other applicable documents
FLOW‐SMSinstrumentshavemodularinstructionmanualsconsistingof:
- FLOW‐SMSseries(documentnr.9.17.057)
- Operationinstructionsdigitalinstruments(documentnr.9.17.023)
- Optionalfieldbus/interfacedescriptions:
- FLOW‐BUSinterface(documentnr.9.17.024)
- PROFIBUS
®
‐DPinterface(documentnr.9.17.025)
- DeviceNet
TM
interface(documentnr.9.17.026)
- RS232interfacewithFLOW‐BUSprotocol(documentnr.9.17.027)
- Modbusinterface(documentnr.9.17.035)
- EtherCATinterface(documentnr.9.17.063)
- Hook‐updiagramsforanalog,RS232andfieldbusoperation
- Dimensionaldrawing(documentnr.7.05.813)
9.17.057 page 5
Thesedocuments,exceptforthedimensionaldrawing,canbefoundinPDFformatontheCD
“Documentationandsoftwaretools”,furnishedwiththedeliveredinstruments.Thedocumentsare
alsoavailableon:http://www.bronkhorst.com/en/downloads
orcanbeappliedforatourlocalsales&servicerepresentatives
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